Wafer Level Test System
Vmax=200 (300) V
Imax=400 mA (1 A)
Pmax=20 (50) W
Current measure range:
100 fA...1 A
Voltage measure range:
10 µV...200 (300) V
Switch Matrix:
Up to 96 outputs
Interface to wafer handler
- Wide measure range (100 fA to 1 A*, 10 µV to 300 V*)
- Accurate (0.05% base accuracy)
- Full-featured software environment with ready-to-use test library
- Wafer handler control
- USB, LAN, GPIB, RS232 interface options
- Data analyis and export features
- Can be combined with external equipment
- Complete with switch matrix, cables and customized DUT-board (optional)
- Easy-to-use yet powerful
- Reliable by hardware and software self-protection
- Excellent value for money
* Various SMU models available, see specs.
WLR (Wafer Level Reliability) characterization algorithms are included with every mb-Technologies Parameter Analyzer, however only one device can be measured at a time. With the inclusion of a switch matrix the test capacity greatly increases as several devices can be stressed in parallel, thus resulting in a powerful WLR tester!
Optional: Integration of a temperature chamber, interface to semi-automatic or fully-automatical wafer handlers, pulse unit for EEPROM endurance test.