Wafer Level Tester


    • Wide measure range (100 fA to 1 A*, 10 µV to 300 V*)
    • Accurate (0.05% base accuracy)
    • Full-featured software environment with ready-to-use test library
    • Wafer handler control
    • USB, LAN, GPIB, RS232 interface options
    • Data analyis and export features
    • Can be combined with external equipment
    • Complete with switch matrix, cables and customized DUT-board (optional)
    • Easy-to-use yet powerful
    • Reliable by hardware and software self-protection
    • Excellent value for money
* Various SMU models available, see specs.

WLR (Wafer Level Reliability) characterization algorithms are included with every mb-Technologies Parameter Analyzer, however only one device can be measured at a time. With the inclusion of a switch matrix the test capacity greatly increases as several devices can be stressed in parallel, thus resulting in a powerful WLR tester!

Optional: Integration of a temperature chamber, interface to semi-automatic or fully-automatical wafer handlers, pulse unit for EEPROM endurance test.



SMU1012: 300V, 150mA, 15W

SMU1022: 200V, 400mA, 20W

SMU1032: 300V, 300mA, 30W

SMU1052: 200V, 1A, 50W


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Vmax=200 (300) V

Imax=400 mA (1 A)

Pmax=20 (50) W

Current measure range: 100 fA...1 A

Voltage measure range: 10 µV...200 (300) V

Switch Matrix:
Up to 96 outputs

Interface to wafer handler


SMU1012: 300V,150mA

SMU1022: 200V,400mA

SMU1032: 300V,300mA

SMU1052: 200V, 1A